KLA-Tencor P-16+ Stylus Profiler

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KLA-Tencor P-16+ Stylus Profiler

The P-16+ stylus profiler is a surface metrology analysis solution used in a wide range of applications and industries, from R&D departments and universities to production and process monitoring. This surface analysis solution’s precise force control provides excellent vertical resolution, precision, and reliability measurements. This surface analysis solution delivers automated step height analysis, surface contour, waviness and roughness measurements with detailed 2D or 3D analysis of topography for a variety of surfaces and materials.

The P-6 Stylus profiler and surface analysis system is capable of addressing a wide range of measurements and applications:


  • Semiconductor
    CMP monitoring and bump metrology
  • Material Science
    Thin film thickness, roughness and stress analysis
  • Data Storage
    Thin film head structure definition and disk edge roll-off
  • Optoelectronics
    Microlens and diffuser shape
  • MEMS
    Etch rates and trench depth analysis
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