Takatori ATM-3000EF

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Takatori ATM-3000EF


  • State-of-the-art design to maintain the integrigy of the lamination area and to achieve the best footprint.
  • Ergonomic design for optimum access to operator areas and service areas on the system
  • Tape stretch data control.
  • Ease of operation
  • FOUP option
  • AGV and OHT protocol option
  • Applicable to 8″ and 12″ dia-wafer
  • Heater roller and heater table are applicable