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- State-of-the-art design to maintain the integrigy of the lamination area and to achieve the best footprint.
- Ergonomic design for optimum access to operator areas and service areas on the system
- Tape stretch data control.
- Ease of operation
- FOUP option
- AGV and OHT protocol option
- Applicable to 8″ and 12″ dia-wafer
- Heater roller and heater table are applicable