Contamination Products

Absolute Contamination Standards
Calibrate instruments which size and detect particles on the surface of bare silicon wafers.

Silica Contamination Standards
The Silica Contamination Standard (SCS) is used to calibrate high-intensity UV and DUV tools.

Reticle Contamination Standards (RCS)
The Reticle Contamination Standard (RCS) is used to calibrate instruments which size and detect particles on the surface of a reticle or its protective pellicle.

Edge Contamination Standards
The Edge Contamination Standard is designed for particle size standards calibration of instruments that detect and size particles standards on the substrate’s wafer edge.

Leopard Contamination Standards
The Edge Contamination Standard is designed for particle size standards calibration of instruments that detect and size particles standards on the substrate’s wafer edge.