AutoLoad Surface Topography Standards (ALSTS)

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AutoLoad Surface Topography Standards (ALSTS)

3D SPM MEASUREMENTS THAT STAND OUT. The AutoLoad Surface Topography Standard (ALSTS) uses a combination of step height and pitch to enable three-dimensional calibration of optical interferometric microscopes and AFMs. Multiple pitch gratings take calibration further, allowing characterization of scan linearity. On high resolution tools such as the Atomic Force Microscope, traceable calibration can be achieved, driving your equipment to its full potential.

The ALSTS consists of 5 pitch clusters of varying dimension patterned in a layer of silicon dioxide and coated with Chromium for optimum contrast. The center cluster is certified and traceable, while the remaining clusters are for daily use monitors to extend the life of the standard.

Each pitch cluster contains three distinct grid patterns spaced 100 µm apart. Each grid pattern measures approximately 270 µm x 270 µm and consists of an array of alternating bars and spaces with pitch in both X and Y directions. Each model comes standard with 3 pitch clusters, and is available in vertical step heights of either18 nm, 44 nm, 100 nm, or 180 nm. Our manufacturing technique utilizes advanced lithography methods to obtain a very regular topographic pattern, and statistical sampling to allow accurate measurement across the entire working area of the standard. The Surface Topography Standard is certified and traceable for both pitch and step height.

  • SEMI Specification Silicon Wafers
    200 mm and 300 mm
  • Materials
    Silicon Dioxide on Silicon coated with Chromium
  • Nominal Pitch Values (X and Y)
    3 µm, 10 µm, and 20 µm (all on one standard)
  • Available Nominal Heights (Z)
    18 nm, 44 nm, 100 nm, 180 nm
  • Traceability
    Pitch and Step Height: Traceable to SI Units through NIST
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