Ultra Thick Step Height Standards

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Ultra Thick Step Height Standards

TAKE A STEP UP! Ultra Thick Step Height Standards (UTSHS) are designed to calibrate mechanical or optical surface profilers where steps of 100 µm or above are required. These standards consist of a 10 mm x 10 mm silicon die mounted on a 50 mm x 50 mm x 5 mm anodized aluminum substrate.

The Ultra Thick Step Height Standards consist of a trench etched into a silicon die. The width of the trench is approximately 1 mm. The length of the trench is approximately 4.5 mm. The calibrated area is clearly marked with pointers. The single crystal silicon material that the standard is made of assures a very flat and smooth working surface as well as parallelism of the top and bottom surface. These standards are extremely accurate with a stated 0.05% or better uncertainty. The standard is mounted on an extremely flat, scratch resistant, anodized aluminum substrate.

  • Nominal Step Heights:
    150 µm, 200 µm, and 250 µm
  • Silicon Die Size:
    10 mm x 10 mm
  • Substrate Size 50 mm x 50 mm x 5 mm
  • Uncertainty
    0.05% or better
  • Traceability
    Traceable through PTB
    Calibrated Specimens
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