ITO Sheet Resistance Standards (ITOSRS)

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ITO Sheet Resistance Standards (ITOSRS)

THE FINISHING TOUCH FOR FLAT PANEL METROLOGY. Indium Tin Oxide Sheet Resistance Standards (ITOSRS) from VLSI Standards are traceable products, intended for calibration of both contact and non-contact sheet resistance measurement tools used in the LCD, flat panel and touch-screen markets.

The ITO Sheet Resistance Standard consists of a glass substrate with a thin film of indium tin oxide sputtered on it. The entire surface of the glass substrate is coated with the ITO film, but only the center portion of the substrate, 30 mm in diameter, is certified. The standard is suitable for larger non-contact probes, four point probes, resistivity and other sheet resistance tools and comes with a certificate of calibration

    • Substrate size:
      125 mm x 125 mm x 0.7 mm.
    • Nominal Sheet Resistance Values:
      15 Ω; 90 Ω
    • Material
      90% In2O3 :10% SnO2
    • Certified Area
      30 mm diameter in the center of the plate
    • Sheet Resistance Uniformity in the Certified Area
      < 1.5% (1,s)

Certified Expanded Uncertainty
= 3% for the 15 Ω model(95% confidence)
= 5% for the 90 Ω model (95% confidence)

  • Serialization
    Each plate is individually serialized
  • Traceability
    Traceable to SI Units through NIST SRM 2543 or 2544
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