Water Recycling System (AR927)
System highlights
• Flow capacity up to 20 L/min
• Self-cleaning filter module
• Filtration level < 0.02 µm
• Water pressure control
• Animated process and fault indication
• Data collection and system performance monitoring
• Maintenance alerts
• Auto water fill compensation
• Auto drain selection
• Single phase 220V, 50/60 Hz
Wafer Cleaner
(ADT 997)
System highlights
• Superb performance (cleaning quality)
• Versatility (add-on options)
• Compact
• Robust design
• Enhanced cleaning process
• Process monitoring
• Customization
Options:
• Built-in exhaust blower
• Ionizer
• IR heater
• Surfactant nozzle and tank
• Water resistivity measurement
• CO2 injector
•Tape-less vacuum holding
• Special customized solutions
Manual Wafer Mounter (ADT 966)
System highlights
• Tabletop design
• Back film removal & collection mechanism
• Heating stage plate (temperature controlled)
• Built-in vacuum generator
• Customizable
• Handles all tape types and
frame types (up to 300mm)
• Robust design
Options:
• Electro-Static eliminator
• Plastic frame support
• Rectangular frame support
• Custom chucks and tailor made
solutions
UV Curing System (ADT 955)
System highlights
• Tabletop design
• Lamp life monitoring
• Built-in timing control
• Handles all UV tape types (up to 300mm)
• Robust design • Simple (no moving part)
• Complies with stringent safety standards
Options
• Hand Held UV meter
• Nitrogen kit
• Frame Shutter
• Auto timer sound kit
Spindle Chiller System (ADT 937-A Spindle Chiller)
Specifications:
Temperature Range: +8°C to -35°C
Stability: +0.1°C
Cooling Capacity: 1000W @ 20°C
Refrigerant: R134A
Pumping Capacity: 6.4L/min @ 60 Psi
Reservoir Volume: 1.7 liters
Power: 115 VAC 60 Hz or 230 VAC 50/60 Hz
Dimensions (LxWxH) 525x360x555mm
Weight: 58Kg
C02 Bubble System (ADT 947)
System highlights
• Tabletop design
• Back film removal & collection mechanism
• Heating stage plate
(temperature controlled)
• Built-in vacuum generator
• Customizable
• Handles all tape types and frame types
(up to 300mm)
• Robust design
Options
• Extended resistivity setting range
• Alarm Buzzer
DI Water System (ADT 921)
Specifications
Circulation capacity: 14L/min
Cooling capacity: 7500 BTU/hr
Minimum temperature set point: 6°C
Filtration particle size: 25,50,100,150,200 um
Line voltage: 220 V AC, 50 Hz or 60 Hz
Power: 2200 W
Dimensions: 51°(W) 22° (H) x 29.5° (D)
Height including cover clearance: 71°
Weight (empty/full): 220lbs / 440lbs
Emulsion: MIC-9-NF 10 Liters
ADT Dicing Blades
