Stylus Profilers
Alpha-Step® D-500
The Alpha-Step D-500 is an affordable, easy-to-use benchtop stylus profiler with a manual X-Y stage for 2D step height and surface roughness measurements for both lab and production environments
Alpha-Step® D-600
The Alpha-Step D-500 is an affordable, easy-to-use benchtop stylus profiler with a manual X-Y stage for 2D step height and surface roughness measurements for both lab and production environments
Tencor™ P-7
The Tencor P-7 leverages the industry-leading topography sensor and ultra-flat scanning technology of the Tencor P-17 in a platform that offers the best price to performance for a benchtop stylus profiler.
The system supports 2D and 3D measurements of step heights, roughness, bow, and stress for scans up to 150mm without stitching.
The P-17 stylus profilometer offers step height measurement capability for steps from a few nanometers to one millimeter, for production and R&D environments.
The system supports 2D and 3D measurements of step heights, roughness, bow and stress for scans up to 200mm without stitching.
The Tencor P-170 profilometer enables fully automated measurements for the compound semiconductor industry, supporting cassette-to-cassette wafer handling including silicon, sapphire, silicon carbide, gallium arsenide, glass and more.
It offers a step height measurement capability for steps from a few nanometers to one millimeter, for production environments.
Optical Profiler
The Profilm3D® benchtop optical profiler utilizes white light interferometry, TotalFocus™ infinite depth-of-field imaging, or Enhanced Roughness Mode to provide easy, non-contact measurement of 3D step heights, roughness, and other surface topography.
Nanoindenters
The iMicro is a flexible, user-friendly nanoindenter for modulus, hardness (Oliver-Pharr analysis, ISO 14577), storage and loss modulus, and universal testing.
They can exert up to 1N of force to test hard materials at higher loads and larger depths.
It is fitted with optional actuators for testing of soft materials, tribology, lateral force and other measurements requiring the determination of force and displacement along two axes.
The G200 is a fully extendible, production-proven nanoindenter with automated high-throughput hardness measurement capability.
With the largest force range in the KLA nanoindenter product family, the Nano Indenter G200 can be used to measure Young’s modulus, hardness, fracture toughness, wear/scratch resistance, coefficient of friction, high-temperature creep response and viscoelastic properties of many types of materials.
The G200X has a flexible, user-friendly interface for nanoscale mechanical testing.
The Nano Indenter G200X uses high-speed controller electronics, an upgraded user interface and advanced InView™ software to enable a variety of optional advanced application modules: frequency-specific testing, quantitative scratch and wear testing, integrated probe-based imaging, high-temperature testing and custom test protocols.
The iMicro is a flexible, user-friendly nanoindenter for modulus, hardness (Oliver-Pharr analysis, ISO 14577), storage and loss modulus, and universal testing.
They can exert up to 1N of force to test hard materials at higher loads and larger depths.
It is fitted with optional actuators for testing of soft materials, tribology, lateral force and other measurements requiring the determination of force and displacement along two axes.
The G200 is a fully extendible, production-proven nanoindenter with automated high-throughput hardness measurement capability.
With the largest force range in the KLA nanoindenter product family, the Nano Indenter G200 can be used to measure Young’s modulus, hardness, fracture toughness, wear/scratch resistance, coefficient of friction, high-temperature creep response and viscoelastic properties of many types of materials.
The G200X has a flexible, user-friendly interface for nanoscale mechanical testing.
The Nano Indenter G200X uses high-speed controller electronics, an upgraded user interface and advanced InView™ software to enable a variety of optional advanced application modules: frequency-specific testing, quantitative scratch and wear testing, integrated probe-based imaging, high-temperature testing and custom test protocols.
The iNano is a flexible, user-friendly, low-force nanoindenter that can perform a wide range of nanomechanical tests. Capable of exerting up to 50mN force to test thin films and soft materials.
Their performance allows them an accurate, flexible, user-friendly instrument can perform a wide range of nanoscale mechanical tests including indentation, hardness, scratch and universal nanoscale testing. It also allows to make measuring thin-films, coatings and small volumes of material easy.
The NanoFlip Nanoindenter is a compact, flexible nanomechanical tester for in situ testing inside scanning electron microscopes or gloveboxes or on benchtops, under either ambient or vacuum conditions.
It measures hardness, modulus, yield strength, stiffness and other nanomechanical tests with high accuracy and precision under both vacuum and ambient conditions.
This product is considered to have the highest performance nanoindenter for testing the mechanical properties of small volumes of material under vacuum at temperatures up to 800°C. Real-time deformation data adds to the understanding of material performance at elevated temperatures.
The InSEM® HT (high temperature) measures hardness, modulus and stiffness at high temperature by independently heating both the tip and sample in a vacuum environment.
This T150 UTM Tensile Tester is considered the industry’s highest performance and most versatile nano tensile tester, using industry-leading continuous dynamic analysis (CDA) to generate dynamic storage and loss modulus measurements spanning five orders of magnitude.
It employs an electromagnetic transducer head to produce tensile force (load on sample) combined with a precise capacitive gauge to deliver high sensitivity over a large range of strain.
KLA Filmetrics
Thin-Film Measurement Systems
Relied on by automotive hardcoat companies around the world to measure hardcoat thickness on flat and curved surfaces. The Measure Thickness of Single- and Multi-Layer Hardcoats of The F10-HC is based on the Filmetrics® F20 platform where analysis of spectral reflectance data provides film thickness measurement results quickly.
The advanced simulation algorithms in the F10-HC software are specifically designed to measure the thickness of single and multiple layers (e.g., primer/hardcoat) encountered in polycarbonate and other hardcoat applications.
The KLA Filmetrics F10-RT Performs simultaneous measurement of reflectance and transmittance; supports calculations of film thickness and refractive index. It captures reflectance and transmittance spectra with a single mouse-click.
For a fraction of the price of legacy reflectometry systems, users can measure min/max and color. Data can be exported and printed easily.
This is a versatile, affordable general film thickness product that has a refractive index measurement system. Thickness and refractive index can be measured in less than a second. Like all of our thickness measurement instruments, the F20 connects to the USB port of your Windows® computer and sets up in minutes.
The different F20 instruments are distinguished primarily by the thickness measurement range, which in turn is determined by the instrument's wavelength range. The standard F20 is considered a popular product.
This product utilizes near infra-red (NIR) light for the measurement of semiconducting and dielectric layers up to 3mm thick. The F3-sX uses near-infrared (NIR) light to measure layer thickness.
The KLA Filmetrics F10-RT is a small, portable tool designed for the measurement of coating thickness on small witness samples, such as parylene-coated coupons. F3-CS has a fast thickness measurement software that makes thickness easily setting you sample on the stage.
The F30 provides in situ, real-time measurement of deposition rate, film thickness, and optical constants (n and k) for the analysis of film uniformity and composition of semiconductor and dielectric layers. It is considered the best tool for monitoring thin-film deposition.
The Filmetrics F32 measures deposition rate, film thickness, optical constants, and uniformity in real time, with the capability to measure up to four spots simultaneously.
The Filmetrics F40 has an integrated live video camera, coupled with microscope optics to produce a film thickness measurement spot size.
The spot size can be as small as 1µm, for the measurement of patterned, curved, and non-uniform samples.
The Filmetrics F50 uses an automated R-Theta stage for rapid, automatic film thickness mapping of wafer sizes up to 300mm as quickly as 0.5 seconds per site.
Due the different F50 instruments they are distinguished primarily by thickness and wavelength range.
Sheet Resistance Measurement
The Filmetrics R50-4PP contact four-point probe system maps metal layer thickness, sheet resistance, sheet resistivity, sheet conductance, and sheet conductivity.
The 10-decade measurement capability and large Z range make the R50-4PP ideal for a wide variety of applications. It is also available to accommodate larger sample sizes.
The Filmetrics R50-EC non-contact eddy current system maps metal layer thickness, sheet resistance, sheet resistivity, sheet conductance, and sheet conductivity.
The non-contact eddy current sheet resistance measurement is ideal for measuring resistance and film thickness on sensitive and/or flexible conductive surfaces. It is available to accommodate larger sample sizes.