KLA | Millice

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Alpha-Step® D-500

Features

Step Height: Nanometers to 1200µm
Low Force: 0.03 to 15mg
Video: 5MP high-resolution color camera
Keystone Correction: Removes distortion due to side view optics
Arc Correction: Removes error due to arc motion of the stylus
Compact Size: Smallest system footprint for a bench top stylus profiler
Software: User friendly software interface

Applications

Step Height: 2D step height
Texture: 2D roughness and waviness
Form: 2D bow and shape
Stress: 2D thin film stress

Alpha-Step® D-600

Features

Step Height: Nanometers to 1200µm
Low Force: 0.03 to 15mg
Video: 5MP high-resolution color camera
Keystone Correction: Removes distortion due to side view optics
Arc Correction: Removes error due to arc motion of the stylus
Compact Size: Small system footprint
Software: User friendly software interface

Applications

Step Height: 2D and 3D step height
Texture: 2D and 3D roughness and waviness
Form: 2D bow and shape
Stress: 2D thin film stress

Tencor P7

Features

Step height: Nanometers to 1000µm
Low force with constant force control: 0.03 to 50mg
Scan full diameter of the sample without stitching
Video: 5MP high-resolution color camera
Arc correction: Removes error due to arc motion of the stylus
Software: Easy-to-use software interface
Production capability: Fully automated with sequencing, pattern recognition and SECS/GEM

Applications

Step height: 2D and 3D step height

Texture: 2D and 3D roughness and waviness
Form: 2D and 3D bow and shape
Stress: 2D and 3D thin film stress
Defect review: 2D and 3D defect surface topography

TencorP17 & TencorP17 OF

Features

Step height: Nanometers to 1000µm
Low force with constant force control: 0.03 to 50mg
Scan full diameter of the sample without stitching
Video: 5MP high-resolution color camera
Arc correction: Removes error due to arc motion of the stylus
Software: Easy-to-use software interface
Production capability: Fully automated with sequencing, pattern recognition and SECS/GEM

Applications

Step height: 2D and 3D step height
Texture: 2D and 3D roughness and waviness
Form: 2D and 3D bow and shape
Stress: 2D and 3D thin film stress
Defect review: 2D and 3D defect surface topography

Tencor P170

Features

Step height: Nanometers to 1000µm
Low force with constant force control: 0.03 to 50mg
Scan full diameter of the sample without stitching
Video: 5MP high-resolution color camera
Arc correction: Removes error due to arc motion of the stylus
Software: Easy-to-use software interface
Production capability: Fully automated with sequencing, pattern recognition and SECS/GEM
Wafer handler: Automatically loads 75mm through 200mm opaque (e.g., silicon) and transparent (e.g., sapphire) samples

Applications

Step height: 2D and 3D step height
Texture: 2D and 3D roughness and waviness
Form: 2D and 3D bow and shape
Stress: 2D and 3D thin film stress
Defect review: 2D and 3D defect surface topography

HRP260

Features

Step Height: Nanometers to 327µm
Low Force with constant force control: 0.03 to 50mg
Scan full diameter of the sample without stitching
Video: In-line low and high magnification optics
Arc Correction: Removes error due to arc motion of the stylus
Software: Easy-to-use software interface
Production Capability: Fully automated with sequencing, pattern recognition, and SECS/GEM
Wafer Handler: Automatically loads 75mm through 200mm opaque (e.g., silicon) and transparent (e.g., sapphire) samples
HRP: High-resolution scanning stage with resolution similar to an AFM

Applications

Step Height: 2D and 3D step height
Texture: 2D and 3D roughness and waviness
Form: 2D and 3D bow and shape
Stress: 2D and 3D thin film stress
Defect Review: 2D and 3D defect surface topography

NanoFlip

Features

InForce 50 actuator for capacitance displacement measurement and electromagnetic force actuation with interchangeable tips
InQuest high-speed controller electronics with 100kHz data acquisition rate and 20µs time constant
XYZ motion system for sample targeting
SEM video capture for synchronized SEM images with test data
Unique software-integrated tip-calibration system for fast, accurate tip calibration
InView control and data review software with Windows ®10 compatibility and method developer for user-designed experiments

Applications

Hardness and modulus measurements (Oliver-Pharr)
Continuous stiffness measurement
High speed material property maps
ISO 14577 hardness testing
Nano Dynamic Mechanical Analysis (DMA)
Quantitative scratch and wear testing

MicroXam-800

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InSEM® HT

Features

InForce 50 actuator with tip heating for capacitance displacement measurement and electromagnetic force actuation with interchangeable tips
Sample heating up to 800 °C with 10mm sample-size and vacuum-compatible sample mounting system
InQuest high speed controller electronics with 100kHz data acquisition rate and 20µs time constant
XYZ motion system for sample targeting
SEM video capture for synchronized SEM images with test data
Unique software-integrated tip-calibration system for fast, accurate tip calibration
InView control and data review software with Windows ® 10 compatibility and method developer for user-designed experiments

Applications

High temperature testing
Hardness and modulus measurements (Oliver-Pharr)
Continuous stiffness measurement
High speed material property maps
Creep measurement
Strain rate sensitivity

Profilm 3D

Features

Vertical scanning and phase shifting interferometry for measurement of surface features from nanometers to millimeters
Automated X-Y stage with a long travel range, great for mapping and stitching scans
Automated focus with industry-leading long piezo travel range for scanning multiple surfaces separated by large height distances
Intuitive software suite including advanced Profilm desktop, the cloud-based ProfilmOnline and mobile applications for flexible data storage, visualization and analysis
TotalFocus imaging, resulting in stunning True Color images with every pixel in focus, even on surfaces with height variation larger than the objective’s depth-of-focus

Applications

Step height: 3D step height from nanometers to millimeters
Texture: 3D roughness and waviness
Form: 3D bow and shape
True Color: TotalFocus image of the 3D surface topography
Edge rolloff: 3D edge profile measurements
Defect review: 3D defect surface topography

iMicro

Features

InForce 1000 actuator for capacitance displacement measurement and electromagnetic force actuation with interchangeable tips
Optional InForce 50 actuator provide maximum 50mN normal force for measuring soft materials, and optional Gemini 2D force transducer for two-axis dynamic measurement. Unique software-integrated tip-calibration system for fast, accurate tip calibration
InQuest high-speed controller electronics with 100kHz data acquisition rate and 20µs time constant
XY motion system with easy mounting magnetic sample holder
High stiffness gantry with integrated vibration isolation
Integrated microscope with digital zoom for precise indentation targeting
ISO 14577 and standardized test methods
InView software package with RunTest, ReviewData, InFocus reporting, InView University online training and InView mobile application

Applications

Hardness and modulus measurements (Oliver-Pharr)
High speed material property maps
ISO 14577 hardness testing
Polymer tan delta, storage and loss modulus
Quantitative scratch and wear testing
High Temperature Nanoindentation Testing

NanoFlip

Features

InForce 50 actuator for capacitance displacement measurement and electromagnetic force actuation with interchangeable tips
InQuest high-speed controller electronics with 100kHz data acquisition rate and 20µs time constant
XYZ motion system for sample targeting
SEM video capture for synchronized SEM images with test data
Unique software-integrated tip-calibration system for fast, accurate tip calibration
InView control and data review software with Windows ®10 compatibility and method developer for user-designed experiments

Applications

Hardness and modulus measurements (Oliver-Pharr)
Continuous stiffness measurement
High speed material property maps
ISO 14577 hardness testing
Nano Dynamic Mechanical Analysis (DMA)
Quantitative scratch and wear testing

T150 UTM

Features

Electromagnetic transducer for high sensitivity over a large range of strain
Dynamic characterization mode for measurement of evolution of mechanical properties with strain
Flexible, upgradeable and configurable system for a variety of applications
Easy test protocol development for real-time experimental control
Compliant with ASTM standards