Alpha-Step® D-600

Stylus Profiler

Alpha-Step® D-600


  • Step Height: Nanometers to 1200µm

  • Low Force: 0.03 to 15mg

  • Video: 5MP high-resolution color camera

  • Keystone Correction: Removes distortion due to side view optics

  • Arc Correction: Removes error due to arc motion of the stylus

  • Compact Size: Small system footprint

  • Software: User friendly software interface


  • Step Height: 2D and 3D step height

  • Texture: 2D and 3D roughness and waviness

  • Form: 2D bow and shape

  • Stress: 2D thin film stress