Tencor™ P-170

Stylus Profiler

Tencor™ P-170

Features

  • Step height: Nanometers to 1000µm

  • Low force with constant force control: 0.03 to 50mg

  • Scan full diameter of the sample without stitching

  • Video: 5MP high-resolution color camera

  • Arc correction: Removes error due to arc motion of the stylus

  • Software: Easy-to-use software interface

  • Production capability: Fully automated with sequencing, pattern recognition and SECS/GEM

  • Wafer handler: Automatically loads 75mm through 200mm opaque (e.g., silicon) and transparent (e.g., sapphire) samples

Applications

  • Step height: 2D and 3D step height

  • Texture: 2D and 3D roughness and waviness

  • Form: 2D and 3D bow and shape

  • Stress: 2D and 3D thin film stress

  • Defect review: 2D and 3D defect surface topography