KLA-Tencor Profiler

KLA-Tencor profiler provide surface metrology analysis solution used in a wide range of applications and industries, from R&D departments and universities to production and process monitoring. This surface analysis solution’s precise force control provides excellent vertical resolution, precision, and reliability measurements. This surface analysis solution delivers automated step height analysis, surface contour, waviness and roughness measurements with detailed 2D or 3D analysis of topography for a variety of surfaces and materials.

Contact Profilometry

Development Series focusing on the needs of the engineering and research community.
Development Series motorized stage focusing on the needs of the engineering and research community.
Ideal for semiconductor pilot lines and materials research.
Offers a combination of advanced features for process development and manufacturing control.
Production Series for surface analysis solution's precise force control provides excellent vertical resolution, precision, and reliability measurements.

Optical Profilometry

Development Series manual systen with full featured 3D surface profiler and optical interferometry products.
Production Series automatic system with full featured 3D surface profiler and optical interferometry products.
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