KLA-Tencor Profiler

KLA-Tencor profiler provide surface metrology analysis solution used in a wide range of applications and industries, from R&D departments and universities to production and process monitoring. This surface analysis solution’s precise force control provides excellent vertical resolution, precision, and reliability measurements. This surface analysis solution delivers automated step height analysis, surface contour, waviness and roughness measurements with detailed 2D or 3D analysis of topography for a variety of surfaces and materials.

Contact Profilometry

Alpha-Step D-100 Stylus Profiler
Development Series focusing on the needs of the engineering and research community.

AlphaStep D-120 Stylus Profiler
Development Series motorized stage focusing on the needs of the engineering and research community.

Alpha-Step IQ Surface Profiler
Ideal for semiconductor pilot lines and materials research.

P-6 Stylus Profiler
Offers a combination of advanced features for process development and manufacturing control.

P-16+ Stylus Profiler
Production Series for surface analysis solution’s precise force control provides excellent vertical resolution, precision, and reliability measurements.

Optical Profilometry

Microxam-100 Optical Profiler
Development Series manual systen with full featured 3D surface profiler and optical interferometry products.

Microxam-1200 Optical Profiler
Production Series automatic system with full featured 3D surface profiler and optical interferometry products.