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Inspection Systems
Inspection Sysems
Semiconductor Auto Review System
Solution for the review of defects of semiconductor integrated circuit detected by AOI/AVI at front end processing, helps to eliminate false defects and increase overall yield.
(click image for specifications)
Wafer Overlay Inspection System
Solution to inspect and measure two-sided pattern and wafer overlay misalignment. Inspects pattern at top/back side, top/top side and bonded wafer boundary without causing any damage.
(click image for specifications)
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