Silica Contamination Standards


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Silica Contamination Standards

The Silica Contamination Standard (SCS) is used to calibrate high-intensity UV and DUV tools which size and detect particles on the surface of bare silicon wafers. Use SCS to characterize particles, before particles characterize products



The Silica Contamination Standard is built by depositing highly spherical silica spheres which have well-characterized optical properties and a very tight monodisperse size distribution. Damage resistant silica spheres are useful for the calibration and monitoring of instruments that measure and count particles with high power UV optics. Available for the first time, silica particles retain their calibration properties from prolonged exposure to UV light, where other materials may degrade or deform. VLSI Standards supplies Silica Contamination Standards with a variety of sphere sizes in the range of 34 nm up to 5 micron.

The calibration certificate includes the approximate number of particles deposited on the wafer. Background contamination is kept at an extremely low level and is defined on the measurement certificate.

  • SEMI Specification Silicon Wafers
    300 mm and 450 mm diameter silicon wafers.
  • Silica Spheres
    From 32 nm up to 1.5 micron*
  • Traceability
    Traceable to SI Units through NIST