Dimensional Products

Designed for the calibration of mechanical or optical surface profilers.
Designed for the calibration of surface profilers and Atomic Force Microscopes (AFM) equipped with robotic wafer handling.
Uses a combination of step height and pitch to enable three-dimensional calibration of optical interferometric microscopes and AFMs.
Utilizes gratings with near perfect periodicity to calibrate magnification and scan linearity of CD-SEM and Atomic Force Microscopes (AFM).
Designed to calibrate mechanical or optical surface profilers where steps of 100 µm or above are required.
Uses a combination of step height and pitch to enable three-dimensional calibration of optical interferometric microscopes and AFMs.
Use these dimensional calibration standards for tool matching, calibrating the width of a CD-AFM tip, or CD-SEM diagnostics.
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