Dimensional Products

Quartz Step Height Standards (SHS)
Designed for the calibration of mechanical or optical surface profilers.

AutoLoad Step Height Standards (ALSHS)
Designed for the calibration of surface profilers and Atomic Force Microscopes (AFM) equipped with robotic wafer handling.

Autoload Surface Topography Standards (ALSTS)
Uses a combination of step height and pitch to enable three-dimensional calibration of optical interferometric microscopes and AFMs.

Nanolattice Standards (NLSM)
Utilizes gratings with near perfect periodicity to calibrate magnification and scan linearity of CD-SEM and Atomic Force Microscopes (AFM).

Ultra Thick Step Height Standard(UTSHS)
Designed to calibrate mechanical or optical surface profilers where steps of 100 µm or above are required.

Surface Topography Standards (STS)
Uses a combination of step height and pitch to enable three-dimensional calibration of optical interferometric microscopes and AFMs.

NanoCD Standards (NCD)
Use these dimensional calibration standards for tool matching, calibrating the width of a CD-AFM tip, or CD-SEM diagnostics.